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外延薄膜

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GaP

外延薄膜

Major capability parameter
single crystal
Doped
conduction type
concentration of flows cm-3
Density
cm-2
Growth method
Max size
Substrate
GaP
S
Undoped
N
N
2~8×1017
2~6×1016
<105
LEC
Dia50
2″×0.5
 
Size(mm)
25×25×0.5mm、10×10×0.5mm、10×5×0.5mm、5×5×0.5mm
Special size and orientation are available upon request
Surface rough
Surface roughness(Ra):<=5A
Polishing
Single or double
Pack
100 clean bag,1000 exactly clean bag